Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12096544 | Lithography thermal control | Tai-Yu Chen, Sagar Deepak Khivsara, Hsiang-Lin Chen, Chieh Hsieh, Sheng-Kang Yu +5 more | 2024-09-17 |
| 12055867 | Lithography contamination control | Chieh Hsieh, Tai-Yu Chen, Heng-Hsin Liu, Li-Jui Chen, Shang-Chieh Chien | 2024-08-06 |
| 12019378 | Methods of cleaning a lithography system | Tai-Yu Chen, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen +1 more | 2024-06-25 |