Issued Patents 2024
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119129 | EUV lithography apparatus | Cheng-Hung Tsai, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2024-10-15 |
| 12096544 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang-Lin Chen, Chieh Hsieh +5 more | 2024-09-17 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2024-09-17 |
| 12078933 | System and method for omnidirectional real time detection of photolithography characteristics | Tai-Yu Chen, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-09-03 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu, Ming-Hsun Tsai +7 more | 2024-08-20 |
| 12061423 | Method and apparatus for mitigating tin debris | Cheng-Hung Tsai, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2024-08-13 |
| 12019378 | Methods of cleaning a lithography system | Cho-Ying Lin, Tai-Yu Chen, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen +1 more | 2024-06-25 |
| 12007694 | Lithography apparatus and method | Wei-Chun Yen, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-06-11 |
| 11948702 | Radiation source apparatus and method for using the same | Wei-Chung Tu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-04-02 |
| 11906902 | Semiconductor processing tool and methods of operation | Tai-Yu Chen, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-02-20 |