Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Ming-Hsun Tsai, Hsin-Feng Chen +6 more | 2024-12-10 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Yu-Huan Chen +7 more | 2024-09-17 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Sheng-Kang Yu, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu +7 more | 2024-08-20 |
| 12063734 | Droplet generator assembly and method of replacing components | Yu-Kuang SUN, Ming-Hsun Tsai, Cheng-Hao LAI, Hsin-Feng Chen, Chiao-Hua Cheng +6 more | 2024-08-13 |
| 12028959 | EUV light source and apparatus for EUV lithography | Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng, Hsiao-Lun Chang | 2024-07-02 |