Issued Patents 2024
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12167525 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen, Tzung-Chi Fu +1 more | 2024-12-10 |
| 12124178 | Lithography system and method | Hao-Yu Lan, Ching-Juinn Huang, Tzung-Chi Fu, Tsung-Yen Lee | 2024-10-22 |
| 12114412 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong +3 more | 2024-10-08 |
| 12085861 | Control of dynamic gas lock flow inlets of an intermediate focus cap | Chun-Kai Chang, Yu Sheng CHIANG, Yu De LIOU, Chi-Ming Yang, Ching-Juinn Huang | 2024-09-10 |
| 12085585 | Particle image velocimetry of extreme ultraviolet lithography systems | En Hao Lai, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen | 2024-09-10 |
| 12055865 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Li-Jui Chen, Che-Chang Hsu, Chi-Ming Yang | 2024-08-06 |
| 12044975 | Extreme ultraviolet control system | Jen-Yang Chung, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen | 2024-07-23 |
| 12025918 | Method for lithography in semiconductor fabrication | Cheng-Kuan Wu, Li-Jui Chen, Chih-Tsung Shih | 2024-07-02 |
| 12028959 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Li-Jui Chen, Hsiao-Lun Chang | 2024-07-02 |
| 11997778 | Replacement and refill method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen | 2024-05-28 |
| 11984314 | Particle removal method | Siao-Chian Huang, Ching-Juinn Huang, Tzung-Chi Fu, Tsung-Yen Lee | 2024-05-14 |
| 11982944 | Method of lithography process and transferring a reticle | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen +1 more | 2024-05-14 |
| 11979971 | EUV light source and apparatus for lithography | Yen-Shuo Su, Chun-Lin Chang, Han-Lung Chang, Li-Jui Chen | 2024-05-07 |
| 11973302 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu +2 more | 2024-04-30 |