Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130556 | Plasma position control for extreme ultraviolet lithography light sources | Hsin-Feng Chen, Chi-Ming Yang, Li-Jui Chen | 2024-10-29 |
| 12055865 | Extreme ultraviolet lithography system | Po-Chung Cheng, Li-Jui Chen, Che-Chang Hsu, Chi-Ming Yang | 2024-08-06 |