Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Ming-Hsun Tsai +6 more | 2024-12-10 |
| 12130556 | Plasma position control for extreme ultraviolet lithography light sources | Ssu-Yu Chen, Chi-Ming Yang, Li-Jui Chen | 2024-10-29 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen +7 more | 2024-09-17 |
| 12063734 | Droplet generator assembly and method of replacing components | Yu-Kuang SUN, Ming-Hsun Tsai, Wei-Shin Cheng, Cheng-Hao LAI, Chiao-Hua Cheng +6 more | 2024-08-13 |