Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Hsin-Feng Chen +6 more | 2024-12-10 |
| 12158701 | Particle removal device and method | Cheng-Hsuan Wu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-12-03 |
| 12124644 | Mouse pad device | Ho-Lung Lu, Pai-Yang Chou | 2024-10-22 |
| 12114411 | Apparatus and method for generating extreme ultraviolet radiation | Yu-Huan Chen, Yu-Chih Huang, Shang-Chieh Chien, Heng-Hsin Liu | 2024-10-08 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2024-09-17 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Sheng-Kang Yu, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu +7 more | 2024-08-20 |
| 12063734 | Droplet generator assembly and method of replacing components | Yu-Kuang SUN, Wei-Shin Cheng, Cheng-Hao LAI, Hsin-Feng Chen, Chiao-Hua Cheng +6 more | 2024-08-13 |
| 12055864 | Droplet generator and method of servicing a photolithographic tool | Yu-Huan Chen, Cheng-Hsuan Wu, Shang-Chieh Chien, Li-Jui Chen | 2024-08-06 |
| 11921941 | Mouse pad device | Ho-Lung Lu, Pai-Yang Chou | 2024-03-05 |