Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Ming-Hsun Tsai +6 more | 2024-12-10 |
| 12158701 | Particle removal device and method | Ming-Hsun Tsai, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-12-03 |
| 12100697 | Semiconductor package structure | Chang-Yu Lin | 2024-09-24 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2024-09-17 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Sheng-Kang Yu, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu +7 more | 2024-08-20 |
| 12063734 | Droplet generator assembly and method of replacing components | Yu-Kuang SUN, Ming-Hsun Tsai, Wei-Shin Cheng, Cheng-Hao LAI, Hsin-Feng Chen +6 more | 2024-08-13 |
| 12055864 | Droplet generator and method of servicing a photolithographic tool | Yu-Huan Chen, Ming-Hsun Tsai, Shang-Chieh Chien, Li-Jui Chen | 2024-08-06 |
| 11942585 | Optoelectronic package structure and method of manufacturing the same | Chang-Yu Lin, Yu-Sheng Huang | 2024-03-26 |