Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu, Ming-Hsun Tsai +7 more | 2024-08-20 |
| 12007694 | Lithography apparatus and method | Chi-Ming Yang, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-06-11 |