Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Wei-Shin Cheng, Ming-Hsun Tsai, Hsin-Feng Chen +6 more | 2024-12-10 |
| 12125715 | Chip package structure with nickel layer | Kuo-Ching Hsu, Chen-Shien Chen | 2024-10-22 |
| 12111582 | Substrate stage and substrate processing system using the same | Yu-Chih Huang, Ya-An PENG, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-10-08 |
| 12114411 | Apparatus and method for generating extreme ultraviolet radiation | Yu-Chih Huang, Ming-Hsun Tsai, Shang-Chieh Chien, Heng-Hsin Liu | 2024-10-08 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2024-09-17 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Sheng-Kang Yu, Shang-Chieh Chien, Wei-Chun Yen, Heng-Hsin Liu +7 more | 2024-08-20 |
| 12055864 | Droplet generator and method of servicing a photolithographic tool | Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien, Li-Jui Chen | 2024-08-06 |
| 12002746 | Chip package structure with metal-containing layer | Kuo-Ching Hsu, Chen-Shien Chen | 2024-06-04 |