Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147166 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Jui-Pin Wu, Chun-Lin Chang, Han-Lung Chang, Heng-Hsin Liu | 2024-11-19 |
| 12130555 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Chieh Hsieh, Shang-Chieh Chien, Chun-Lin Chang, Li-Jui Chen +1 more | 2024-10-29 |
| 12114412 | Shock wave visualization for extreme ultraviolet plasma optimization | Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong, Chun-Lin Chang +3 more | 2024-10-08 |
| 11979971 | EUV light source and apparatus for lithography | Chun-Lin Chang, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2024-05-07 |
| 11860544 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen | 2024-01-02 |