Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11860544 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Han-Lung Chang, Li-Jui Chen, Yen-Shuo Su | 2024-01-02 |
SS
Shi-Han SHANN
Overall (2024): #269,172 of 561,600Top 50%
1
Patents 2024