Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147166 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Yen-Shuo Su, Jui-Pin Wu, Chun-Lin Chang, Heng-Hsin Liu | 2024-11-19 |
| 12133319 | Apparatus and method for generating extreme ultraviolet radiation | Ting-Ya CHENG, Chun-Lin Chang, Li-Jui Chen | 2024-10-29 |
| 12114412 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong +3 more | 2024-10-08 |
| 12028959 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Li-Jui Chen, Po-Chung Cheng, Hsiao-Lun Chang | 2024-07-02 |
| 11997778 | Replacement and refill method for droplet generator | Shih-Yu Tu, Hsiao-Lun Chang, Li-Jui Chen, Po-Chung Cheng | 2024-05-28 |
| 11979971 | EUV light source and apparatus for lithography | Yen-Shuo Su, Chun-Lin Chang, Li-Jui Chen, Po-Chung Cheng | 2024-05-07 |
| 11973302 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2024-04-30 |
| 11921431 | Advanced load port for photolithography mask inspection tool | Tung-Jung Chang, Jen-Yang Chung | 2024-03-05 |
| 11860544 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Shi-Han SHANN, Li-Jui Chen, Yen-Shuo Su | 2024-01-02 |