Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147166 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Yen-Shuo Su, Jui-Pin Wu, Han-Lung Chang, Heng-Hsin Liu | 2024-11-19 |
| 12130555 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen +1 more | 2024-10-29 |
| 12133319 | Apparatus and method for generating extreme ultraviolet radiation | Ting-Ya CHENG, Li-Jui Chen, Han-Lung Chang | 2024-10-29 |
| 12114412 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Henry Yee Shian Tong +3 more | 2024-10-08 |
| 12009177 | Detection using semiconductor detector | Ya-Chin King, Chrong-Jung Lin, Burn Jeng Lin, Chien-Ping Wang, Shao-Hua Wang +1 more | 2024-06-11 |
| 11979971 | EUV light source and apparatus for lithography | Yen-Shuo Su, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2024-05-07 |
| 11973302 | Methods and systems for aligning master oscillator power amplifier systems | Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2024-04-30 |