Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12167525 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen +1 more | 2024-12-10 |
| 12124178 | Lithography system and method | Hao-Yu Lan, Po-Chung Cheng, Ching-Juinn Huang, Tsung-Yen Lee | 2024-10-22 |
| 12099310 | System and method for cleaning an EUV mask | Yen-Hui Li, Cheng-Han Yeh | 2024-09-24 |
| 11982944 | Method of lithography process and transferring a reticle | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Li-Jui Chen, Po-Chung Cheng +1 more | 2024-05-14 |
| 11984314 | Particle removal method | Siao-Chian Huang, Po-Chung Cheng, Ching-Juinn Huang, Tsung-Yen Lee | 2024-05-14 |
| 11973302 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Bo-Tsun Liu +2 more | 2024-04-30 |