Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12028959 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2024-07-02 |
| 11997778 | Replacement and refill method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2024-05-28 |
| 11982944 | Method of lithography process and transferring a reticle | Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2024-05-14 |