Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085865 | System and method for detecting debris in a photolithography system | Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-09-10 |
| 11997778 | Replacement and refill method for droplet generator | Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen, Po-Chung Cheng | 2024-05-28 |
| 11953839 | Highly efficient automatic particle cleaner method for EUV systems | Shao-Hua Wang, Yen-Hao LIU, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2024-04-09 |