Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164235 | Semiconductor processing tool and methods of operation | Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG, Yi-Fam Shiu +3 more | 2024-12-10 |
| 12009177 | Detection using semiconductor detector | Ya-Chin King, Chrong-Jung Lin, Burn Jeng Lin, Chien-Ping Wang, Chun-Lin Chang +1 more | 2024-06-11 |
| 11953839 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Yen-Hao LIU, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2024-04-09 |