YL

Yen-Hao LIU

TSMC: 1 patents #2,264 of 4,162Top 55%
Overall (2024): #211,105 of 561,600Top 40%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11953839 Highly efficient automatic particle cleaner method for EUV systems Shih-Yu Tu, Shao-Hua Wang, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu 2024-04-09