Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164235 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG +3 more | 2024-12-10 |
| 12009246 | Substrate holder and methods of use | Yu-Chi Tsai | 2024-06-11 |
| 11982944 | Method of lithography process and transferring a reticle | Hsiao-Lun Chang, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2024-05-14 |
| 11953839 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Li-Jui Chen, Heng-Hsin Liu | 2024-04-09 |