Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174545 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Shang-Chieh Chien, Gwan Sin Chang +5 more | 2024-12-24 |
| 12130555 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Shang-Chieh Chien, Chun-Lin Chang, Li-Jui Chen +1 more | 2024-10-29 |
| 12096544 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang-Lin Chen, Sheng-Kang Yu +5 more | 2024-09-17 |
| 12085865 | System and method for detecting debris in a photolithography system | Shih-Yu Tu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-09-10 |
| 12055867 | Lithography contamination control | Tai-Yu Chen, Cho-Ying Lin, Heng-Hsin Liu, Li-Jui Chen, Shang-Chieh Chien | 2024-08-06 |
| 12044975 | Extreme ultraviolet control system | Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2024-07-23 |
| 12019378 | Methods of cleaning a lithography system | Cho-Ying Lin, Tai-Yu Chen, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen +1 more | 2024-06-25 |
| 11914301 | Photoresist, method of manufacturing a semiconductor device and method of extreme ultraviolet lithography | Wei-Han Lai, Ching-Yu Chang | 2024-02-27 |