CC

Ching-Yu Chang

TSMC: 34 patents #40 of 4,162Top 1%
Overall (2024): #844 of 561,600Top 1%
35
Patents 2024

Issued Patents 2024

Showing 1–25 of 35 patents

Patent #TitleCo-InventorsDate
12181798 Extreme ultraviolet photolithography method with developer composition An-Ren Zi, Joy Cheng, Chin-Hsiang Lin 2024-12-31
12174540 Method of manufacturing a semiconductor device An-Ren Zi 2024-12-24
12159787 Method of manufacturing a semiconductor device and pattern formation method Chih-Cheng Liu, Ming-Hui Weng, Jr-Hung Li, Yahru Cheng, Chi-Ming Yang +1 more 2024-12-03
12148610 Spin on carbon composition and method of manufacturing a semiconductor device Jing Hong Huang, Wei-Han Lai 2024-11-19
12134690 Photoresist composition and method of manufacturing a semiconductor device Yen-Hao Chen, Wei-Han Lai 2024-11-05
12135502 Resin, photoresist composition, and method of manufacturing semiconductor device Siao-Shan Wang, Chin-Hsiang Lin 2024-11-05
12135501 Method of manufacturing a semiconductor device Ming-Hui Weng, Chen-Yu Liu, Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI +5 more 2024-11-05
12106961 Humidity control or aqueous treatment for EUV metallic resist An-Ren Zi, Yahru Cheng, Chin-Hsiang Lin 2024-10-01
12087616 Air gap formation method Chun-Chih HO, Yu-Chung Su, Chin-Hsiang Lin 2024-09-10
12087644 Methods of determining process recipes and forming a semiconductor device Jung-Hau Shiu, Jei-Ming Chen, Jr-Yu Chen, Tze-Liang Lee 2024-09-10
12085855 Resin, photoresist composition, and method of manufacturing semiconductor device Siao-Shan Wang, Chin-Hsiang Lin 2024-09-10
12074025 Photoresist developer and method of developing photoresist Ming-Hui Weng, An-Ren Zi, Chen-Yu Liu 2024-08-27
12074058 Patterning methods for semiconductor devices Wei-Ren Wang, Shing-Chyang Pan, Wan-Lin Tsai, Jung-Hau Shiu, Tze-Liang Lee 2024-08-27
12074027 Underlayer of multilayer structure and methods of use thereof Jing Hong Huang, Wei-Han Lai 2024-08-27
12057315 Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern Yi-Chen Kuo, Chih-Cheng Liu, Ming-Hui Weng, Jia-Lin WEI, Yen-Yu Chen +4 more 2024-08-06
12050404 Photoresist with polar-acid-labile-group An-Ren Zi 2024-07-30
12025920 Lithography techniques for reducing defects Ming-Hui Weng 2024-07-02
12019375 Photosensitive material and method of lithography An-Ren Zi, Chien-Wei Wang 2024-06-25
12009210 Method of manufacturing a semiconductor device An-Ren Zi, Chin-Hsiang Lin 2024-06-11
12002710 Semiconductor structure and methods of forming the same Yu-Hsin Chan, Jiing-Feng Yang, Kuan-Wei Huang, Meng-Shu Lin, Yu-Yu Chen +3 more 2024-06-04
11984316 Porogen bonded gap filling material in semiconductor manufacturing Bo-Jiun Lin, Hai-Ching Chen, Tien-I Bao 2024-05-14
11971657 Photoresist developer and method of developing photoresist An-Ren Zi, Chin-Hsiang Lin, Yahru Cheng 2024-04-30
11971659 Photoresist composition and method of forming photoresist pattern Chun-Chih HO, Chin-Hsiang Lin 2024-04-30
11966162 Photoresist composition and method of manufacturing a semiconductor device Tzu-Yang Lin, Chin-Hsiang Lin 2024-04-23
D1024352 Bio particle application device Chien-Yu Peng, Pei-Hsiu Kao 2024-04-23