Issued Patents 2024
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181798 | Extreme ultraviolet photolithography method with developer composition | An-Ren Zi, Joy Cheng, Ching-Yu Chang | 2024-12-31 |
| 12154822 | Dummy fin structures and methods of forming same | Keng-Chu Lin, Shwang-Ming Jeng, Teng-Chun Tsai, Tsu-Hsiu Perng, Fu-Ting Yen | 2024-11-26 |
| 12148653 | Method of manufacturing semiconductor devices | Ru-Gun Liu, Chih-Ming Lai, Wei-Liang Lin, Yung-Sung Yen | 2024-11-19 |
| 12135502 | Resin, photoresist composition, and method of manufacturing semiconductor device | Siao-Shan Wang, Ching-Yu Chang | 2024-11-05 |
| 12106961 | Humidity control or aqueous treatment for EUV metallic resist | An-Ren Zi, Yahru Cheng, Ching-Yu Chang | 2024-10-01 |
| 12087616 | Air gap formation method | Chun-Chih HO, Yu-Chung Su, Ching-Yu Chang | 2024-09-10 |
| 12087861 | FinFETs and methods of forming FinFETs | Tai-Chun Huang, Tien-I Bao | 2024-09-10 |
| 12085855 | Resin, photoresist composition, and method of manufacturing semiconductor device | Siao-Shan Wang, Ching-Yu Chang | 2024-09-10 |
| 12080779 | Capping layer for gate electrodes | Teng-Chun Tsai, Huang-Lin Chao, Akira Mineji | 2024-09-03 |
| 12050399 | Pellicle assembly and method of making same | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien, Li-Jui Chen, Tsai-Sheng Gau | 2024-07-30 |
| 12009210 | Method of manufacturing a semiconductor device | An-Ren Zi, Ching-Yu Chang | 2024-06-11 |
| 11971659 | Photoresist composition and method of forming photoresist pattern | Chun-Chih HO, Ching-Yu Chang | 2024-04-30 |
| 11971657 | Photoresist developer and method of developing photoresist | An-Ren Zi, Ching-Yu Chang, Yahru Cheng | 2024-04-30 |
| 11966162 | Photoresist composition and method of manufacturing a semiconductor device | Tzu-Yang Lin, Ching-Yu Chang | 2024-04-23 |
| 11955338 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang +3 more | 2024-04-09 |
| 11935757 | Method of manufacturing a semiconductor device | Yen-Hao Chen, Wei-Han Lai, Ching-Yu Chang | 2024-03-19 |
| 11886121 | Method for forming patterned photoresist | Chun-Chih HO, Ching-Yu Chang | 2024-01-30 |
| 11862465 | Fine line patterning methods | Shih-Chun Huang, Chiu-Hsiang Chen, Ya-Wen Yeh, Yu-Tien Shen, Po-Chin Chang +7 more | 2024-01-02 |