Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085867 | Lithography process monitoring method | Chih-Jie Lee, Shih-Ming Chang, Ken-Hsien Hsieh, Yung-Sung Yen, Ru-Gun Liu | 2024-09-10 |
| 12014926 | Self aligned litho etch process patterning method | Chih-Min HSIAO, Chien-Wen Lai, Yung-Sung Yen, Chih-Ming Lai, Ru-Gun Liu | 2024-06-18 |
| 11955338 | Directional deposition for semiconductor fabrication | Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen +3 more | 2024-04-09 |
| 11862465 | Fine line patterning methods | Chiu-Hsiang Chen, Ya-Wen Yeh, Yu-Tien Shen, Po-Chin Chang, Chien-Wen Lai +7 more | 2024-01-02 |