SC

Shih-Ming Chang

TSMC: 11 patents #274 of 4,162Top 7%
Overall (2024): #7,416 of 561,600Top 2%
11
Patents 2024

Issued Patents 2024

Showing 1–11 of 11 patents

Patent #TitleCo-InventorsDate
12125850 Buried metal track and methods forming same Pochun Wang, Ting-Wei Chiang, Chih-Ming Lai, Hui-Zhong Zhuang, Jung-Chan Yang +6 more 2024-10-22
12094691 Etch apparatus for compensating shifted overlayers Chun-Yen Chang, Yu-Tien Shen, Chih-Kai Yang, Ya Hui Chang 2024-09-17
12085867 Lithography process monitoring method Chih-Jie Lee, Shih-Chun Huang, Ken-Hsien Hsieh, Yung-Sung Yen, Ru-Gun Liu 2024-09-10
12062543 Line-end extension method and device Chih-Min HSIAO, Chien-Wen Lai, Ru-Gun Liu, Chih-Ming Lai, Yung-Sung Yen +1 more 2024-08-13
12038693 Method of manufacturing photo masks Chien-Cheng Chen, Chia-Jen Chen, Hsin-Chang Lee, Tran-Hui Shen, Yen-Cheng HO +1 more 2024-07-16
12020984 Methods for forming self-aligned interconnect structures Ru-Gun Liu, Hoi-Tou Ng 2024-06-25
12019974 Geometric mask rule check with favorable and unfavorable zones Shinn-Sheng Yu, Jue-Chin Yu, Ping-Chieh Wu 2024-06-25
11994805 Method of operating semiconductor apparatus Chiu-Hsiang Chen, Ru-Gun Liu 2024-05-28
11929258 Via connection to a partially filled trench Chih-Ming Lai, Ru-Gun Liu, Tsai-Sheng Gau, Chung-Ju Lee, Tien-I Bao +1 more 2024-03-12
11899367 Dummy insertion for improving throughput of electron beam lithography Wen Lo, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou +2 more 2024-02-13
11899373 Proximity effect correction in electron beam lithography Wen Lo 2024-02-13