Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147154 | EUV photo masks and manufacturing method thereof | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien | 2024-11-19 |
| 12130548 | Extreme ultraviolet mask with reduced wafer neighboring effect | Wen-Chang Hsueh, Huan-Ling Lee, Hsin-Chang Lee | 2024-10-29 |
| 12107149 | Air spacer and method of forming same | Ming-Jhe Sie, Chen-Huang Huang, Shao-Hua Hsu, Cheng-Chung Chang, Szu-Ping Lee +2 more | 2024-10-01 |
| 12085866 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Da-Wei Yu, Li-Hsin Wang, Kuan-Wen Lin, Hsin-Chang Lee | 2024-09-10 |
| 12038693 | Method of manufacturing photo masks | Chien-Cheng Chen, Hsin-Chang Lee, Shih-Ming Chang, Tran-Hui Shen, Yen-Cheng HO +1 more | 2024-07-16 |
| 12032302 | Method and device for cleaning substrates | Chung-Hsuan Liu, Chen-Yang Lin, Ku-Hsiang Sung, Da-Wei Yu, Kuan-Wen Lin +1 more | 2024-07-09 |
| 11982936 | Photomask and method of fabricating a photomask | Hsin-Chang Lee, Ping-Hsun Lin, Yen-Cheng HO, Chih-Cheng Lin | 2024-05-14 |
| 11899357 | Lithography mask | Chien-Cheng Chen, Huan-Ling Lee, Ta-Cheng Lien, Hsin-Chang Lee | 2024-02-13 |
| 11860532 | Photomask including fiducial mark and method of making a semiconductor device using the photomask | Hsin-Chang Lee, Ping-Hsun Lin, Chih-Cheng Lin | 2024-01-02 |