Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085866 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Li-Hsin Wang, Kuan-Wen Lin, Chia-Jen Chen, Hsin-Chang Lee | 2024-09-10 |
| 12032302 | Method and device for cleaning substrates | Chung-Hsuan Liu, Chen-Yang Lin, Ku-Hsiang Sung, Kuan-Wen Lin, Chia-Jen Chen +1 more | 2024-07-09 |