Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181797 | Extreme ultraviolet mask with alloy based absorbers | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2024-12-31 |
| 12044959 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Wei-Che Hsieh, Ta-Cheng Lien, Hsin-Chang Lee, Hao-Ping Cheng +2 more | 2024-07-23 |
| 12001132 | Protection layer on low thermal expansion material (LTEM) substrate of extreme ultraviolet (EUV) mask | Pei-Cheng Hsu, Ta-Cheng Lien, Shih-Che Wang, Hsin-Chang Lee | 2024-06-04 |
| 11982936 | Photomask and method of fabricating a photomask | Hsin-Chang Lee, Yen-Cheng HO, Chih-Cheng Lin, Chia-Jen Chen | 2024-05-14 |
| 11860532 | Photomask including fiducial mark and method of making a semiconductor device using the photomask | Hsin-Chang Lee, Chih-Cheng Lin, Chia-Jen Chen | 2024-01-02 |