Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025917 | System and method for supplying and dispensing bubble-free photolithography chemical solutions | Wen-Zhan Zhou, Heng-Jen Lee, Hsu-Yuan Liu, Yu-Chen Huang, Cheng-Han Wu +1 more | 2024-07-02 |
| 12001132 | Protection layer on low thermal expansion material (LTEM) substrate of extreme ultraviolet (EUV) mask | Pei-Cheng Hsu, Ta-Cheng Lien, Ping-Hsun Lin, Hsin-Chang Lee | 2024-06-04 |
| 11955335 | Method and apparatus for coating photo resist over a substrate | Tung-Hung FENG, Hui-Chun LEE, Sheng Jiang | 2024-04-09 |