Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130548 | Extreme ultraviolet mask with reduced wafer neighboring effect | Huan-Ling Lee, Chia-Jen Chen, Hsin-Chang Lee | 2024-10-29 |
| 12019367 | Mask blanks and methods for depositing layers on mask blank | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien | 2024-06-25 |