Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094691 | Etch apparatus for compensating shifted overlayers | Yu-Tien Shen, Chih-Kai Yang, Ya Hui Chang, Shih-Ming Chang | 2024-09-17 |
| 12027368 | Method for fabricating semiconductor device | Yu-Tien Shen, Chih-Kai Yang, Hsiang-Ming CHANG, Ya Hui Chang, Wei-Ting Chien +2 more | 2024-07-02 |