Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12153350 | Method of manufacturing semiconductor devices | Ru-Gun Liu, Huicheng Chang, Chia-Cheng Chen, Jyu-Horng Shieh, Liang-Yin Chen +7 more | 2024-11-26 |
| 12125712 | Landing metal etch process for improved overlay control | Chih-Min HSIAO, Chih-Ming Lai, Chien-Wen Lai, Ru-Gun Liu | 2024-10-22 |
| 12094691 | Etch apparatus for compensating shifted overlayers | Chun-Yen Chang, Yu-Tien Shen, Chih-Kai Yang, Shih-Ming Chang | 2024-09-17 |
| 12027368 | Method for fabricating semiconductor device | Yu-Tien Shen, Chih-Kai Yang, Hsiang-Ming CHANG, Chun-Yen Chang, Wei-Ting Chien +2 more | 2024-07-02 |
| 11955338 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Yung-Sung Yen +3 more | 2024-04-09 |
| 11908731 | Via-first self-aligned interconnect formation process | Yu-Tse LAI | 2024-02-20 |
| 11862465 | Fine line patterning methods | Shih-Chun Huang, Chiu-Hsiang Chen, Ya-Wen Yeh, Yu-Tien Shen, Po-Chin Chang +7 more | 2024-01-02 |