Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11899367 | Dummy insertion for improving throughput of electron beam lithography | Shih-Ming Chang, Chun-Hung Liu, Chia-Hua Chang, Hsin-Wei Wu, Ta-Wei Ou +2 more | 2024-02-13 |
| 11899373 | Proximity effect correction in electron beam lithography | Shih-Ming Chang | 2024-02-13 |