Issued Patents 2024
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12159787 | Method of manufacturing a semiconductor device and pattern formation method | Chih-Cheng Liu, Ming-Hui Weng, Jr-Hung Li, Chi-Ming Yang, Tze-Liang Lee +1 more | 2024-12-03 |
| 12135501 | Method of manufacturing a semiconductor device | Ming-Hui Weng, Chen-Yu Liu, Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI +5 more | 2024-11-05 |
| 12106961 | Humidity control or aqueous treatment for EUV metallic resist | An-Ren Zi, Ching-Yu Chang, Chin-Hsiang Lin | 2024-10-01 |
| 12094952 | Air spacer formation with a spin-on dielectric material | Ting-Ting Chen, Chen-Han Wang, Keng-Chu Lin, Shuen-Shin Liang, Tsu-Hsiu Perng +3 more | 2024-09-17 |
| 12087592 | Ambient controlled two-step thermal treatment for spin-on coating layer planarization | Chen-Fong Tsai, Ya-Lun CHEN, Tsai-Yu Huang, Huicheng Chang, Yee-Chia Yeo | 2024-09-10 |
| 12057315 | Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern | Yi-Chen Kuo, Chih-Cheng Liu, Ming-Hui Weng, Jia-Lin WEI, Yen-Yu Chen +4 more | 2024-08-06 |
| 12013641 | Method of reducing undesired light influence in extreme ultraviolet exposure | Chih-Tsung Shih, Chen-Ming Wang, Bo-Tsun Liu, Tsung Chuan Lee | 2024-06-18 |
| 12002675 | Photoresist layer outgassing prevention | Yen-Yu Chen, Chih-Cheng Liu, Yi-Chen Kuo, Jr-Hung Li, Tze-Liang Lee +1 more | 2024-06-04 |
| 11971657 | Photoresist developer and method of developing photoresist | An-Ren Zi, Chin-Hsiang Lin, Ching-Yu Chang | 2024-04-30 |
| 11942322 | Method of manufacturing semiconductor devices and pattern formation method | An-Ren Zi, Chun-Chih HO, Ching-Yu Chang | 2024-03-26 |
| 11901189 | Ambient controlled two-step thermal treatment for spin-on coating layer planarization | Chen-Fong Tsai, Ya-Lun CHEN, Tsai-Yu Huang, Huicheng Chang, Yee-Chia Yeo | 2024-02-13 |