Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181791 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Tsung-Chih Chien, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG +1 more | 2024-12-31 |
| 12072633 | Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof | Chih-Tsung Shih, Yu-Hsun Wu, Bo-Tsun Liu | 2024-08-27 |
| 12066765 | Operating method for preventing photomask particulate contamination | Jui-Chieh Chen, Tsung-Chih Chien, Chih-Tsung Shih | 2024-08-20 |
| 12013641 | Method of reducing undesired light influence in extreme ultraviolet exposure | Chih-Tsung Shih, Chen-Ming Wang, Yahru Cheng, Bo-Tsun Liu | 2024-06-18 |
| 11940727 | Reticle enclosure for lithography systems | Chih-Tsung Shih, Tsung-Chih Chien, Hao-Shiang Chang | 2024-03-26 |