CS

Chih-Tsung Shih

TSMC: 16 patents #173 of 4,162Top 5%
Overall (2024): #3,960 of 561,600Top 1%
16
Patents 2024

Issued Patents 2024

Showing 1–16 of 16 patents

Patent #TitleCo-InventorsDate
12181724 Apparatus and methods for optical interconnects Stefan Rusu, Wei-wei SONG, Mohammed Rabiul Islam 2024-12-31
12181791 Extreme ultraviolet mask and method of manufacturing the same Tsung-Chih Chien, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG, Bo-Tsun Liu +1 more 2024-12-31
12153261 Edge coupler and waveguide structure and forming method thereof Wei Liu, Hau-Yan Lu, Yingkit Felix Tsui 2024-11-26
12124083 Semiconductor structure with multi-layers film Wei Liu, Sui-Ying Hsu, Jing-Hwang Yang, Yingkit Felix Tsui 2024-10-22
12085761 Two-dimensional grating coupler and methods of making same Chewn-Pu Jou, Stefan Rusu, Felix Ying-Kit Tsui, Lan-Chou Cho 2024-09-10
12085751 Semiconductor device and methods of formation Wei Liu, Hau-Yan Lu, Yingkit Felix Tsui, Lee-Shian Jeng 2024-09-10
12072633 Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof Yu-Hsun Wu, Bo-Tsun Liu, Tsung Chuan Lee 2024-08-27
12066765 Operating method for preventing photomask particulate contamination Jui-Chieh Chen, Tsung-Chih Chien, Tsung Chuan Lee 2024-08-20
12025918 Method for lithography in semiconductor fabrication Cheng-Kuan Wu, Po-Chung Cheng, Li-Jui Chen 2024-07-02
12025835 Optical waveguide structure and method for forming the same Hau-Yan Lu, Wei Liu, Yingkit Felix Tsui 2024-07-02
12013641 Method of reducing undesired light influence in extreme ultraviolet exposure Chen-Ming Wang, Yahru Cheng, Bo-Tsun Liu, Tsung Chuan Lee 2024-06-18
11977256 Semiconductor package comprising optically coupled IC chips Hau-Yan Lu, Wei Liu, Yingkit Felix Tsui 2024-05-07
11960116 Optical waveguide coupler Chewn-Pu Jou, Felix Ying-Kit Tsui, Stefan Rusu 2024-04-16
11940727 Reticle enclosure for lithography systems Tsung-Chih Chien, Tsung Chuan Lee, Hao-Shiang Chang 2024-03-26
11908765 Semiconductor structure with heating element Chewn-Pu Jou, Stefan Rusu, Feng-Wei Kuo 2024-02-20
11869991 Semiconductor device and method of making Hau-Yan Lu, Felix Yingkit Tsui, Stefan Rusu, Chewn-Pu Jou 2024-01-09