Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181791 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Tsung-Chih Chien, Shih-Chi Fu, Kuotang CHENG, Bo-Tsun Liu +1 more | 2024-12-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181791 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Tsung-Chih Chien, Shih-Chi Fu, Kuotang CHENG, Bo-Tsun Liu +1 more | 2024-12-31 |