Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181791 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG, Bo-Tsun Liu +1 more | 2024-12-31 |
| 12066765 | Operating method for preventing photomask particulate contamination | Jui-Chieh Chen, Chih-Tsung Shih, Tsung Chuan Lee | 2024-08-20 |
| 11940727 | Reticle enclosure for lithography systems | Chih-Tsung Shih, Tsung Chuan Lee, Hao-Shiang Chang | 2024-03-26 |