Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174545 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien, Gwan Sin Chang +5 more | 2024-12-24 |
| 12096544 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Hsiang-Lin Chen, Chieh Hsieh, Sheng-Kang Yu +5 more | 2024-09-17 |