Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12167525 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Li-Jui Chen, Tzung-Chi Fu +1 more | 2024-12-10 |
| 12044975 | Extreme ultraviolet control system | Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2024-07-23 |
| 11921431 | Advanced load port for photolithography mask inspection tool | Tung-Jung Chang, Han-Lung Chang | 2024-03-05 |