Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124178 | Lithography system and method | Hao-Yu Lan, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2024-10-22 |
| 12085861 | Control of dynamic gas lock flow inlets of an intermediate focus cap | Chun-Kai Chang, Yu Sheng CHIANG, Yu De LIOU, Chi-Ming Yang, Po-Chung Cheng | 2024-09-10 |
| 11984314 | Particle removal method | Siao-Chian Huang, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2024-05-14 |