Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12133319 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Lin Chang, Li-Jui Chen, Han-Lung Chang | 2024-10-29 |
| 12114412 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Henry Yee Shian Tong, Chun-Lin Chang +3 more | 2024-10-08 |
| 11860544 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen, Yen-Shuo Su | 2024-01-02 |