Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130553 | Resist pump buffer tank and method of resist defect reduction | Chen Yi Hsu, Shang-Sheng Li | 2024-10-29 |
| 12092958 | Wafer stage and method of using | Wei-Chih Lin, Chih-Chien Lin | 2024-09-17 |
| 12048944 | Method of operating drippage prevention system | Chien-Hung Wang, Chun-Chih Lin, Chi-Hung Liao, Wei Chang Cheng | 2024-07-30 |
| 11966165 | Immersion exposure tool | — | 2024-04-23 |
| 11966170 | Lithographic overlay correction and lithographic process | Ai-Jen Hung, Heng-Hsin Liu, Chin-Chen Wang, Ying-Ying Wang | 2024-04-23 |
| 11860547 | Extractor piping on outermost sidewall of immersion hood apparatus | Wei-Chih Lin | 2024-01-02 |