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Thermal processing susceptor |
Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more |
2023-12-19 |
| 11835927 |
Reducing substrate surface scratching using machine learning |
Satish Radhakrishnan, Karthik Ramanathan, Karthikeyan Balaraman, Adolph Miller Allen, Xinyuan Chong +5 more |
2023-12-05 |
| 11818810 |
Heater assembly with purge gap control and temperature uniformity for batch processing chambers |
Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Ashutosh Agarwal, Eric J. Hoffmann, Sanjeev Baluja +1 more |
2023-11-14 |
| 11807931 |
Chamber injector |
Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Ian Ong, Nyi O. Myo +1 more |
2023-11-07 |
| 11810766 |
Protection of aluminum process chamber components |
Karthikeyan Balaraman, Sathyanarayana Bindiganavale, Rajasekhar PATIBANDLA, Balamurugan Ramasamy, Umesh M. Kelkar +3 more |
2023-11-07 |
| 11781212 |
Overlap susceptor and preheat ring |
Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Zhiyuan Ye, Richard O. Collins |
2023-10-10 |
| 11735447 |
Enhanced process and hardware architecture to detect and correct realtime product substrates |
Kartik Santhanam, Wolfgang Aderhold, Martin A. Hilkene, Stephen Moffatt |
2023-08-22 |
| 11732355 |
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber |
Vishwas Kumar Pandey, Eric Kihara Shono, Christopher S. Olsen, Agus Sofian Tjandra, Tobin Kaufman-Osborn +2 more |
2023-08-22 |
| 11591689 |
Method for fabricating chamber parts |
Mats Larsson, Kevin A. PAPKE, Chirag Shaileshbhai KHAIRNAR, Rajasekhar PATIBANDLA, Karthikeyan Balaraman +2 more |
2023-02-28 |
| 11586789 |
Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity |
Dhritiman Subha Kashyap, Chaowei Wang, Kevin Griffin, Karthik Ramanathan, Hanhong Chen +2 more |
2023-02-21 |
| 11586160 |
Reducing substrate surface scratching using machine learning |
Satish Radhakrishnan, Karthik Ramanathan, Karthikeyan Balaraman, Adolph Miller Allen, Xinyuan Chong +5 more |
2023-02-21 |
| 11584993 |
Thermally uniform deposition station |
Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Kenneth Brian Doering, Dhritiman Subha Kashyap |
2023-02-21 |
| 11549183 |
Showerhead with inlet mixer |
Ashutosh Agarwal, Sanjeev Baluja, Dhritiman Subha Kashyap, Yanjun Xia |
2023-01-10 |
