Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823939 | Apparatus and methods for processing chamber lid concentricity alignment | Kwok Feng Wong, Rakesh Ramadas | 2023-11-21 |
| 11818810 | Heater assembly with purge gap control and temperature uniformity for batch processing chambers | Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Kartik Shah, Eric J. Hoffmann, Sanjeev Baluja +1 more | 2023-11-14 |
| 11769684 | Wafer heater with backside and integrated bevel purge | Tejas Ulavi, Vijay D. Parkhe, Naveen Kumar Nagaraja, Sanjeev Baluja, Surajit Kumar +1 more | 2023-09-26 |
| 11746417 | Clean isolation valve for reduced dead volume | Sanjeev Baluja | 2023-09-05 |
| 11549183 | Showerhead with inlet mixer | Sanjeev Baluja, Dhritiman Subha Kashyap, Kartik Shah, Yanjun Xia | 2023-01-10 |