Issued Patents 2023
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11818810 | Heater assembly with purge gap control and temperature uniformity for batch processing chambers | Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann +1 more | 2023-11-14 |
| 11794441 | Bonding structure of e chuck to aluminum base configuration | Roger Alan Lindley | 2023-10-24 |
| 11784080 | High temperature micro-zone electrostatic chuck | — | 2023-10-10 |
| 11776794 | Electrostatic chuck assembly for cryogenic applications | — | 2023-10-03 |
| 11776822 | Wet cleaning of electrostatic chuck | Tuochuan Huang, Gang Peng, David W. Groechel, Shinnosuke Kawaguchi, David Benjaminson | 2023-10-03 |
| 11769684 | Wafer heater with backside and integrated bevel purge | Tejas Ulavi, Naveen Kumar Nagaraja, Sanjeev Baluja, Surajit Kumar, Dhritiman Subha Kashyap +1 more | 2023-09-26 |
| 11769683 | Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen | Wendell Glenn Boyd, Jr., Teng-Fang Kuo, Zhenwen Ding | 2023-09-26 |
| 11747834 | Increasing the gas efficiency for an electrostatic chuck | — | 2023-09-05 |
| 11742225 | Electrostatic puck assembly with metal bonded backing plate | — | 2023-08-29 |
| 11676849 | Substrate carrier | — | 2023-06-13 |
| 11640917 | Ground electrode formed in an electrostatic chuck for a plasma processing chamber | Michael R. Rice | 2023-05-02 |
| 11557500 | High temperature heated support pedestal in a dual load lock configuration | — | 2023-01-17 |