| 11818810 |
Heater assembly with purge gap control and temperature uniformity for batch processing chambers |
Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann +1 more |
2023-11-14 |
| 11791190 |
Apparatus and methods for real-time wafer chucking detection |
Tejas Ulavi, Arkaprava Dan, Mike Murtagh |
2023-10-17 |
| 11791136 |
Deposition radial and edge profile tunability through independent control of TEOS flow |
Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon, Tuan Nguyen +1 more |
2023-10-17 |
| 11769684 |
Wafer heater with backside and integrated bevel purge |
Tejas Ulavi, Vijay D. Parkhe, Naveen Kumar Nagaraja, Surajit Kumar, Dhritiman Subha Kashyap +1 more |
2023-09-26 |
| 11746417 |
Clean isolation valve for reduced dead volume |
Ashutosh Agarwal |
2023-09-05 |
| 11713508 |
Apparatus and methods for improving chemical utilization rate in deposition process |
Kevin Griffin, Joseph AuBuchon, Mario D. Silvetti, Hari Ponnekanti |
2023-08-01 |
| 11682576 |
Pedestal heater for spatial multi-wafer processing tool |
Tejas Ulavi, Dhritiman Subha Kashyap |
2023-06-20 |
| 11623253 |
In-situ DC plasma for cleaning pedestal heater |
Tejas Ulavi, Arkaprava Dan, Wei V. Tang |
2023-04-11 |
| 11602064 |
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers |
Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Kalesh Panchaxari Karadi, Tejas Ulavi |
2023-03-07 |
| 11599069 |
Method for auto-tuning and process performance assessment of chamber control |
Mauro Cimino, Arkaprava Dan |
2023-03-07 |
| 11586789 |
Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity |
Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Kevin Griffin, Karthik Ramanathan +2 more |
2023-02-21 |
| 11584993 |
Thermally uniform deposition station |
Jared Ahmad Lee, Joseph AuBuchon, Kenneth Brian Doering, Dhritiman Subha Kashyap, Kartik Shah |
2023-02-21 |
| 11583816 |
Gas distribution plate for thermal deposition |
Jared Ahmad Lee, Joseph AuBuchon, Dhritiman Subha Kashyap, Michael R. Rice |
2023-02-21 |
| 11549183 |
Showerhead with inlet mixer |
Ashutosh Agarwal, Dhritiman Subha Kashyap, Kartik Shah, Yanjun Xia |
2023-01-10 |
