Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821083 | Gas separation control in spatial atomic layer deposition | Ning Li, Steven Marcus, Tai T. Ngo | 2023-11-21 |
| 11761083 | Methods for controlling a flow pulse shape | Joseph AuBuchon, Hanhong Chen | 2023-09-19 |
| 11713508 | Apparatus and methods for improving chemical utilization rate in deposition process | Sanjeev Baluja, Joseph AuBuchon, Mario D. Silvetti, Hari Ponnekanti | 2023-08-01 |
| 11584992 | Gas distribution assembly for improved pump-purge and precursor delivery | Kenneth Brian Doering, Mario David Silvetti | 2023-02-21 |
| 11586789 | Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity | Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Karthik Ramanathan, Hanhong Chen +2 more | 2023-02-21 |
| 11577946 | Fail-safe pneumatic lift system | Abhishek Chowdhury, Kenneth Brian Doering, Santhoshkumar Doddegowdanapalya Nanjundegowda, Somashekhar Kosthi, Abhijit Ghosh | 2023-02-14 |