JA

Joseph AuBuchon

Applied Materials: 10 patents #33 of 1,729Top 2%
Overall (2023): #8,240 of 537,848Top 2%
10
Patents 2023

Issued Patents 2023

Patent #TitleCo-InventorsDate
11823870 PEALD titanium nitride with direct microwave plasma Hanhong Chen, Arkaprava Dan, Kyoung Ha Kim, Philip Allan Kraus 2023-11-21
11791136 Deposition radial and edge profile tunability through independent control of TEOS flow Sanjeev Baluja, Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Tuan Nguyen +1 more 2023-10-17
11761083 Methods for controlling a flow pulse shape Kevin Griffin, Hanhong Chen 2023-09-19
11713508 Apparatus and methods for improving chemical utilization rate in deposition process Kevin Griffin, Sanjeev Baluja, Mario D. Silvetti, Hari Ponnekanti 2023-08-01
11670489 Modular microwave source with embedded ground surface James D. Carducci, Larry D. Elizaga, Richard Fovell, Philip Allan Kraus, Thai Cheng Chua 2023-06-06
11626281 PEALD nitride films Hanhong Chen, Philip Allan Kraus 2023-04-11
11586789 Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Kevin Griffin, Karthik Ramanathan +2 more 2023-02-21
11584993 Thermally uniform deposition station Jared Ahmad Lee, Sanjeev Baluja, Kenneth Brian Doering, Dhritiman Subha Kashyap, Kartik Shah 2023-02-21
11583816 Gas distribution plate for thermal deposition Jared Ahmad Lee, Sanjeev Baluja, Dhritiman Subha Kashyap, Michael R. Rice 2023-02-21
11560624 Precursor delivery system 2023-01-24