Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827514 | Amorphous silicon-based films resistant to crystallization | Aykut Aydin, Krishna Nittala, Karthik Janakiraman, Gautam K. Hemani | 2023-11-28 |
| 11791136 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon, Tuan Nguyen +1 more | 2023-10-17 |
| 11784032 | Tilted magnetron in a PVD sputtering deposition chamber | Lizhong Sun, Xiaodong Yang, Yufei Zhou | 2023-10-10 |
| 11676813 | Doping semiconductor films | Aykut Aydin, Rui Cheng, Krishna Nittala, Karthik Janakiraman, Bo Qi +1 more | 2023-06-13 |
| 11618949 | Methods to reduce material surface roughness | Krishna Nittala, Karthik Janakiraman, Aykut Aydin, Diwakar Kedlaya | 2023-04-04 |